FESEM: Magellan 400 (FEI)
The Magellan 400 is a fully digital FESEM with Schottkey field emitter source mounted on the NG hot-swap gun module that provides record high spatial resolution: 0.6 nm @ 15 kV, 0.9 nm @ 1 kV.
Features and specifications:
- In-lens SE and BSE detection specially designed for high-resolution imaging at both high and low kV’s;
- Everhart-Thornley SE detector for SE detection.
- An integrated IR CCD camera for in-chamber viewing
- Retractable Annular STEM Detector enables scanning transmission imaging in bright field, dark field and high-angle dark field modes.
Energy Dispersive X- Ray Spectrometer (EDS) Bruker
- SLEW Window, detection of Boron and up;
- Energy resolution 123 eV (MnKα, 0 - 100,000 cps);
- Elemental mapping and more
Zebra Fish: x 8,000 Gland Cell: x 25,000
ZnO: x 125,000 SWCTs: x 2,000,000
SEM/FIB Workstation: Helios NanoLab DualBeam 600 (FEI):
The Helios NanoLab™ Workstation is capable of:
- advanced TEM sample preparation
- Resolution: 0.9 nm @ 15 kV, 1.4 nm @ 1 kV
- Detection: in-lens SE and BSE
Sidewinder™ field emission focused ion beam optics with liquid Gallium ion emitter;
- Resolution: 5.0 nm @ 30 kV
- Detection: CDEM detector
- Patterning: Simultaneous imaging and patterning with end-point detection through Real-Time Monitor
- Platinum Deposition;
- Selective Carbon Mill
- Enhanced Etch
- TEM sample preparation: AutoTEM G2; Omniprobe AutoProbe 200.2
- Diagnostics: EDS& EBSD and Pegasus Package, EDAX
Electron Gate: Ion Beam Milling Nano Antenna : Platinum Deposition
OCP-HA layer on Ti substrate: IB Milling
TEM: Titan 80-300 (FEI)
The Titan 80-300 microscope incorporates a novel platform that allows ultimate stability, performance and flexibility:
- High Resolution (HR) TEM mode
- HR Scanning TEM (STEM) mode
- HR Electron Energy Loss Spectroscopy (EELS)
- HR Energy Dispersive X-Ray (EDX)
Features and specifications (300 kV):
- Energy Spread - 0.7 eV
- Point Resolution - 0.2 nm
- Information limit - < 0.1 nm
- STEM Resolution - 0.136 nm
- General purpose TEM images
- HR-TEM images
- Sub Angstrom resolution
- High throughput STEM mode
- X-Ray analysis
EELS allows to obtain elemental and chemical ( such as valence and the coordination of specific atoms) information with nanometer resolution.
TEM image of “flower” (see insert) cross section.
EDX: spectrum from porous layer of “flower” cross section.
EELS: Ti edge “flower” interlayer
Environmental SEM: EVO 50 LEO (Carl Zeiss)
The EVO 50 Zeiss environmental SEM equipped by Peltier Stage, which allows to work both under high and low vacuum conditions, has the following specification:
|Resolution||2.0nm@ 30kV (SE with LaB6 option )|
|Acceleration Voltage||0.2 to 30 kV|
|Magnification||35x to 1,000,000x|
|Field of View||6 mm at the Analytical Working Distance (AWD)|
|EDX-ray Analysis||Oxford Instrument, resolution 133 eV|
|Chamber||Approx. 365 mm (dia.) x 255 mm (h)|
|Image Processing||Resolution: Up to 2304x1024 pixel Signal acquisition by integrating and averaging|
|Image Display||Single flicker-free XVGA monitor with SEM image displayed at 1024 x 768 pixel|
|System Control||Smart-SEM with Windows, operated by mouse, keyboard and optional control panel|
User friendly and with a relatively low user fee, the EVO 50 Zeiss is an attractive option for rapid screening of samples microstructures. It is often used for EDX analysis with spatial resolution of 1 μm.
EDX spectra and data of elemental analysis in the spot of Ga-based monocrystal
The Magellan XHR SEM allows sample imaging at extremely low beam energies (<100 eV), avoiding charge effect at non-conductive nano-scale surfaces.