Notre Dame Integrated Imaging Facility

Format Examples

FESEM: Magellan 400 (FEI)

The Magellan 400 is a fully digital FESEM with Schottkey field emitter source mounted on the NG hot-swap gun module that provides  record high spatial resolution:  0.6 nm @ 15 kV, 0.9 nm @ 1 kV.

Features and specifications:

  • In-lens SE and BSE detection specially designed for high-resolution imaging at both high and low kV’s;
  • Everhart-Thornley SE detector for SE detection.
  • An integrated IR CCD camera for in-chamber viewing
  • Retractable Annular STEM Detector enables scanning transmission imaging in bright field, dark field and high-angle dark field modes. 

Energy Dispersive X- Ray Spectrometer (EDS) Bruker

  • SLEW Window, detection of Boron and up;
  • Energy resolution 123 eV (MnKα, 0 - 100,000 cps);
  • Elemental mapping and more

Zebrafish cell     Gland Cell

Zebra Fish: x 8,000                           Gland Cell: x 25,000

 

zno     swct

ZnO: x 125,000                                 SWCTs: x 2,000,000

 


 

SEM/FIB Workstation: Helios NanoLab DualBeam 600 (FEI):

The Helios NanoLab™ Workstation is capable of: 

Workstation

  •   nano-prototyping
  •   nano-machining
  •   nano-analysis 
  •   advanced TEM sample preparation 

Specifications

Electron optics: 

  • Resolution:  0.9 nm @ 15 kV, 1.4 nm @ 1 kV 
  • Detection: in-lens SE and BSE 

Ion optics: 

Sidewinder™ field emission focused ion beam optics with liquid Gallium ion emitter;  

  • Resolution: 5.0 nm @ 30 kV
  • Detection: CDEM detector

Application:

  • Patterning:  Simultaneous imaging and patterning with end-point detection  through Real-Time Monitor
  • AutoFIB
  • Platinum Deposition;
  • Selective Carbon Mill
  • Enhanced Etch
  • TEM sample preparation: AutoTEM G2;  Omniprobe AutoProbe 200.2
  • Diagnostics:  EDS& EBSD and Pegasus Package, EDAX 

 

electron gate     Nano Antenna

Electron Gate: Ion Beam Milling         Nano Antenna : Platinum Deposition

 

OCP-HA Layer

OCP-HA layer on Ti substrate: IB Milling

 


 

TEM: Titan 80-300 (FEI)

titan80_300

The Titan 80-300 microscope incorporates a novel platform  that allows ultimate stability, performance and flexibility:   

  • High Resolution (HR) TEM mode 
  • HR Scanning TEM (STEM) mode
  • HR Electron Energy Loss Spectroscopy (EELS)
  • HR Energy Dispersive X-Ray (EDX) 

Features and specifications (300 kV):

  • Energy Spread  -  0.7 eV
  • Point Resolution -  0.2 nm
  • Information limit - < 0.1 nm
  • STEM Resolution  - 0.136 nm

Application:

  • General purpose TEM images
  • HR-TEM images
  • Sub Angstrom resolution
  • High throughput STEM mode
  • X-Ray analysis
  • EDX-analysis 
  • EELS

EELS allows to obtain elemental and chemical ( such as valence and the coordination of specific atoms) information with nanometer resolution
 

tem

TEM image of “flower” (see insert) cross section.         
 

edx
EDX: spectrum from porous layer of “flower” cross section.

 

eels

EELS: Ti edge “flower” interlayer

 


 

 

Environmental SEM: EVO 50 LEO (Carl Zeiss)

The EVO 50 Zeiss environmental SEM  equipped by Peltier Stage, which allows to work both under high and low vacuum  conditions, has the following specification:
 

Resolution 2.0nm@ 30kV (SE with LaB6 option )
Acceleration Voltage 0.2 to 30 kV
Magnification 35x to 1,000,000x
Field of View 6 mm at the Analytical Working Distance (AWD)
EDX-ray Analysis Oxford Instrument, resolution 133 eV
Available Detectors
  • SE in HV - Everhart-Thornley
  • SE in VPSE
  • BSD in all modes - quadrant semiconductor diode
Chamber Approx. 365 mm (dia.) x 255 mm (h)
5-Axes
Motorized
Compucentric
Specimen Stage
  • X = 100 mm (+50mm, -50mm)
  • Y = 125 mm (+65 mm, - 60 mm)
  • Z = 55 mm (35 mm motorized)
  • T = 00 - 900
  • R = 3600 (continuous) Stage control by mouse or optional joystick and control panel
Image Processing Resolution: Up to 2304x1024 pixel Signal acquisition by integrating and averaging
Image Display Single flicker-free XVGA monitor with SEM image displayed at 1024 x 768 pixel
System Control Smart-SEM with Windows, operated by mouse, keyboard and optional control panel

Application:

SEM EVO-50 (Carl Zeiss)

User friendly and with a relatively low user fee, the EVO 50 Zeiss  is an attractive option for rapid  screening of samples microstructures. It is often used for EDX analysis with spatial resolution of 1 μm.

 

environmentalsem1

Element Weight% Atomic%
C K 3.10 14.48
O P 0.73 2.56
P K 13.35 24.19
Ga K 41.48 33.40
As L 19.76 14.81
In L 21.58 10.55


quantitativeresultsanalysisspectrum

EDX spectra and data of elemental analysis in the spot of Ga-based monocrystal

Magellan XHR SEM The Magellan XHR SEM allows sample imaging at extremely low beam energies (<100 eV), avoiding charge effect at non-conductive nano-scale surfaces.